Browsing by Author "Ma, Shawming"
Now showing items 1-2 of 2
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Plasma-parameter dependence of thin-oxide damage from wafer charging during electron-cyclotron-resonance plasma processing
Friedmann, James B.; Shohet, J. Leon; Mau, Robert; Hershkowitz, Noah; Bisgaard, Soren; Ma, Shawming; McVittie, James P. (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 1997) -
Thin-oxide charging damage to microelectronic test structures in an electron-cyclotron-resonance plasma
Friedmann, James B.; Shohet, J. Leon; McVittie, James P.; Ma, Shawming (American Institute of Physics, 1995)