Browsing by Author "Liu, Henley L."
Now showing items 2-3 of 3
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Magnetic-field-enhanced rf argon plasma for ionized sputtering of copper
Wang, Weitung; Foster, John; Wendt, Amy E.; Booske, John H.; Onuoha, Tina; Sandstrom, Perry W.; Liu, Henley L.; Gearhart, Steven S.; Hershkowitz, Noah (American Institute of Physics, 1997) -
Recoil implantation method for ultrashallow p+/n junction formation
Liu, Henley L.; Gearhart, Steven S.; Booske, John H.; Cooper, Reid F. (American Institute of Physics, 2000)