Browsing by Author "Cismaru, Cristian"
Now showing items 2-6 of 6
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In situ electrical characterization of dielectric thin films directly exposed to plasma vacuum-ultraviolet radiation
Cismaru, Cristian; Shohet, J. Leon (American Institute of Physics, 2000) -
Photoemission and conduction currents in vacuum ultraviolet irradiated aluminum oxide
Lauer, Jason L.; Shohet, J. Leon; Cismaru, Cristian; Hansen, Roger W.; Foo, Mei Yuin; Henn, Timothy James (American Institute of Physics, 2002) -
Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher
Cismaru, Cristian; Shohet, J. Leon (American Institute of Physics Inc, 1999) -
Relationship between the charging damage of test structures and the deposited charge on unpatterned wafers exposed to an electron cyclotron resonance plasma
Cismaru, Cristian; Shohet, J. Leon; Nauka, Krysztof; Friedmann, James B. (American Institute of Physics, 1998) -
Synchrotron radiation-induced surface-conductivity of SiO2 for modification of plasma charging
Cismaru, Cristian; Shohet, J. Leon; McVittie, James P. (American Institute of Physics, 2000)